ESTIMATING THE INTENSITY OF GERM-GRAIN MODELS WITH OVERLAPPING GRAINS
DOI:
https://doi.org/10.5566/ias.v22.p147-152Keywords:
dislocations, germ-grain model, intensity, Poison cluster process, Poison line process, silicon wafer, spherical contact distribution functionAbstract
Formulas are derived for the spherical contact distribution of a planar germ-grain model Z with circular grains where the germs formeither a 'segment cluster' process or a 'line-based' Poisson point process. They are used in order to estimate the intensityl of the germprocess by means of the spherical contact distribution function. As an application the number of dislocations on a silicon wafer is estimated.Downloads
Published
2011-05-03
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Section
Original Research Paper
How to Cite
Ghorbani, H., & Stoyan, D. (2011). ESTIMATING THE INTENSITY OF GERM-GRAIN MODELS WITH OVERLAPPING GRAINS. Image Analysis and Stereology, 22(3), 147-152. https://doi.org/10.5566/ias.v22.p147-152